KUALA LUMPUR, March 9 (Bernama) -- Mattson Technology Inc., has introduced Novyka, an innovative technology for atomic level surface treatment and ultra-selective etching of extremely thin and delicate materials for continued scaling of 3D logic and memory devices.
New innovations from Mattson in atomic surface engineering address the most critical 3D logic and memory manufacturing challenges.
“There are significant challenges in scaling with 3D structures for advanced memory and logic chips that include small, narrow, deep and complicated features composed of thin layers of different materials,” said chief business officer of Mattson Technology, Dr Subhash Deshmukh.
The new Novyka products offer proprietary chemistries in surface cleaning, surface treatment and surface modification.
“Its unique designs further extend to enable ultra-high selectivity in removal of thin and delicate layers in 3D device structures,” said executive vice-president and chief technology officer of Mattson Technology, Dr Michael Yang.
Meanwhile, its chief executive officer and president, Dr Allen Lu said with Mattson Technology achieving record revenue and profit in 2017, it continued to relentlessly drive technology innovations and provide uncompromising service to its global customer base.
Mattson Technology is a Delaware company which designs, manufactures, markets and supports semiconductor wafer processing equipment.
-- BERNAMA
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